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Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis [Hardcover]

Alvin W. Czanderna , Theodore E. Madey , Cedric J. Powell

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Book Description

Oct 31 1998 0306458969 978-0306458965 1999
Written as a tutorial guide for newcomers to the field of surface analysis, this work is the first book ever published to feature photon, electron, and ion beam effects and beam damage to solids during surface and near-surface analysis and depth profiling. This introductory text describes the principles, techniques, and methods vital for efficient surface analysis. A wealth of practical information is assembled in this single volume, including summary tables, extensive references, and 251 illustrative figures.

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First Sentence
Particle-excited surface spectroscopies such as Rutherford backscattering (RBS), secondary-ion mass spectrometry (SIMS), and Auger electron spectroscopy (AES) produce data that may be strongly affected by the interaction of a particle (ion, electron, etc.) with the solid surface of the sample. Read the first page
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Front Cover | Copyright | Table of Contents | Excerpt | Index | Back Cover
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