- Hardcover: 465 pages
- Publisher: Small Gear Publishing (March 2009)
- Language: English
- ISBN-10: 0982299109
- ISBN-13: 978-0982299104
- Product Dimensions: 25.7 x 18 x 3.3 cm
- Shipping Weight: 1 Kg
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Amazon Bestsellers Rank:
#68,659 in Books (See Top 100 in Books)
- #4 in Books > Science > Technology > Nanotechnology
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Product Details |
Product Description
Product Description
Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include:
Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design.
Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks.
Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered.
Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications.
MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.
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Customer Reviews
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Most Helpful Customer Reviews on Amazon.com (beta)
Amazon.com:
5.0 out of 5 stars (8 customer reviews)
3 of 3 people found the following review helpful:
5.0 out of 5 stars
Best MEMS Book Available, April 8 2009
By S. McNamara - Published on Amazon.com
Ce commentaire est de: Practical Mems: Design of Microsystems, Accelerometers, Gyroscopes, RF Mems, Optical Mems, and Microfluidic Systems (Hardcover)
I am very happy to see this book. It covers MEMS devices. It does not cover microfabrication techniques -- there other books for that subject. It is not a survey book. This is a good book, and it is filled with a lot of useful equations. The book is also very easy to read, and it has a number of good examples. This book is perfect for someone who wants to design MEMS devices.
2 of 2 people found the following review helpful:
5.0 out of 5 stars
Invaluable source of MEMS information, Sep 2 2009
By Antti Jaakkola - Published on Amazon.com
Ce commentaire est de: Practical Mems: Design of Microsystems, Accelerometers, Gyroscopes, RF Mems, Optical Mems, and Microfluidic Systems (Hardcover)
As a MEMS professional I find this book an invaluable complement to the selection of MEMS textbooks - I wish this book had existed already when I started my career in the field. The book is well written, and the practical examples facilitate understanding of the subject. For me, especially the chapters on readout electronics have helped me become a better MEMS designer. I highly recommend investing in this book.
5.0 out of 5 stars
A good intro to MEMS devices, design, etc...., April 15 2009
By J. Sweeney - Published on Amazon.com
Ce commentaire est de: Practical Mems: Design of Microsystems, Accelerometers, Gyroscopes, RF Mems, Optical Mems, and Microfluidic Systems (Hardcover)
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.
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